Nanometer Stepper Preloaded Piezo Actuator with Large Blocking Force and 0~150V Driving Voltage Used as Optical Phase Shifter for Spi and Aoi

Preloaded Piezo Actuators

Preloaded piezo actuators offer nanometer resolution with stroke up to 260μm, microsecond response time. The high internal mechanical preload force is suitable for high load, high dynamic applications. The blocking force is up to 50,000 N, making it ideal for machine tools, active vibration insulation or adaptive mechanics. Its small size and high resonant frequency make it suitable for applications such as scanning microscopy, laser tuning, beam deflection, patch clamp or microlithography.

Open and Closed Loop
Preloaded piezo actuators are available in open loop (no position feedback sensor) and closed loop (integrated position feedback sensor) versions. In its open-loop mode, the resolution is infinitely high, limited only by the noise of the controller, and it also features the hysteresis and creep. In its closed-loop model, the hysteresis, creep and non-linearity are ruled out to make it linear.

Low Voltage Piezo Actuators:
High Voltage Piezo Actuators:
Precautions for Installation and Use of Piezo Actuators
If use the piezoelectric ceramic actuators according to the following text and illustrations, the effect of piezoelectric ceramic actuators can be achieved.
1. Do not use over voltage range specified in the parameter table to drive the piezoelectric actuator.
2. The environment where the piezoelectric actuator is placed should be kept dry and it should be avoided longterm in an environment with high DC electric field and high relative humidity.
3. Do not disassemble the piezoelectric ceramics. (Warning: Electric shock may result!)
4. Do not drop the actuator and avoid any form of mechanical impact.
5. Before operating, it is very important to short-circuit the piezoelectric actuator. Temperature changes and load changes will cause the electrodes of the piezoelectric actuator to charge, without short-circuiting the leads, it may generate a high-voltage electric field, that is, the actuator will charge and discharge quickly, especially for actuators without preload, which may lead to damage. It is recommended to use a resistor for discharge.
6. Preloaded piezoelectric actuator can withstand a certain amount of tensile force, but can't withstand torsion, bending or lateral force. These forces can directly damage the actuator and must be avoided. The lateral force can be removed by flexible ball joints or appropriate guiding mechanisms.

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